发明名称 ALKALI-DEVELOPABLE PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide an alkali-developable photosensitive resin composition excellent in sensitivity and adhesion and capable of accurately forming a fine pattern regardless of whether a photopolymerization initiator is not used or is used in small quantity. <P>SOLUTION: The alkali-developable photosensitive resin composition contains a photopolymerizable unsaturated compound having a structure obtained by esterification reaction of: hydroxyl groups of a reaction product obtained by adding a compound having a &beta;-diketone moiety or a compound having a &beta;-ketoester group to (meth)acryloyl groups of a compound having two or more (meth)acryloyl groups and hydroxyl group; and a polybasic acid anhydride. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009037003(A) 申请公布日期 2009.02.19
申请号 JP20070201355 申请日期 2007.08.01
申请人 ADEKA CORP 发明人 YAMADA KEIJI;SATO NAOMI
分类号 G03F7/027;C08F299/02;C08G59/17 主分类号 G03F7/027
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