| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a thin-film laminated member, wherein a substrate position in the vertical direction can be accurately maintained even when the band-shaped flexible substrate is carried over a long distance in the horizontal direction with the widthwise direction of the substrate oriented toward the vertical direction. <P>SOLUTION: The apparatus includes substrate conveying means 23, 51 for conveying a band-shaped flexible substrate 1 in the horizontal direction in such a manner that the widthwise direction of the substrate is oriented toward the vertical direction, a plurality of film forming chambers 42a to 42m arranged in succession along the direction in which the substrate is conveyed for forming films on the surface of the substrate, and pairs of grip rollers 44a to 44m arranged between the plurality of film-forming chambers for pinching upper and lower edge portions of the substrate in the horizontal direction. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
