| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a platinum film on a base like an organic film. SOLUTION: The method of forming the platinum film is provided, wherein a platinum compound is sublimated from a second base containing the platinum compound and sublimated gas thereof is supplied onto a first base for formation of the platinum film and decomposed to form the platinum film on a surface of the fist base. COPYRIGHT: (C)2009,JPO&INPIT
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