FILM-FORMING METHOD, AND FILM FORMING DEVICE

摘要

A film-forming method includes: a) discharging a liquid including a film material on an object so as to form a liquid film made of the liquid; b) measuring distribution of an optical constant related to a film thickness of a thin film by irradiating the liquid film with light from a first light source so as to detect light from the liquid film; and c) modulating light from a second light source corresponding to the optical constant of the liquid film based on converting data indicating a relation between the optical constant and light wave information of the light from the second light source while irradiating the liquid film with the light from the second light source so as to dry the liquid film to form the thin film on the object.