HEATING FURNACE AND HEATING METHOD EMPLOYED BY HEATING FURNACE

摘要

A hydrogen vacuum furnace (100) is provided with a processing chamber (1) wherein a subject (10) to be heated is stored; a heating chamber (2) wherein a heater lamp (25) is stored; and a quartz board (3) for separating the subject (10) and the heater lamp (25) one from the other. In the hydrogen vacuum furnace (100), the subject (10) is heated by a radiant ray applied from the heater lamp (25). The processing chamber (1) and the heating chamber (2) are provided with gas feed ports (11, 21) and exhaust ports (12, 22), respectively, for feeding and exhausting a gas. When the subject to be heated (10) is being heated, atmospheric pressure of each chamber is adjusted so that the heating chamber (2) is under positive pressure to the processing chamber (1) by feeding or exhausting the gas.