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发明名称
Vorrichtung zum gleichzeitigen Herstellen von mindestens vier Bondverbindungen und Verfahren dazu
摘要
申请公布号
DE10014308(B4)
申请公布日期
2009.02.19
申请号
DE20001014308
申请日期
2000.03.23
申请人
INFINEON TECHNOLOGIES AG
发明人
HACKE, HANS-JUERGEN;HUEBNER, HOLGER;KOENIGER, AXEL;SEITZ, MAX-GERHARD;TILGNER, RAINER
分类号
H01L21/603;H01L21/00;H01L23/50
主分类号
H01L21/603
代理机构
代理人
主权项
地址
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