发明名称 OPTICAL APPARATUS
摘要 An optical apparatus is disclosed that has a convex mirror and a concave mirror with an aperture, wherein, in use, radiation from a radiation emitter passes through the aperture and is incident upon the convex mirror before being incident upon the concave mirror, the optical apparatus arranged to form the radiation into a radiation beam, wherein the concave mirror is translatable towards and away from the convex mirror or the convex mirror is translatable towards and away from the concave mirror, to adjust divergence of the radiation beam.
申请公布号 KR20090018149(A) 申请公布日期 2009.02.19
申请号 KR20087031005 申请日期 2008.12.19
申请人 ASML NETHERLANDS B.V. 发明人 MICKAN UWE;VAN DIJSSELDONK ANTONIUS JOHANNES JOSEPHUS
分类号 G02B27/18;G02B27/14;G03F7/20 主分类号 G02B27/18
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