| 发明名称 |
METHODS AND APPARATUS FOR EX SITU SEASONING OF ELECTRONIC DEVICE MANUFACTURING PROCESS COMPONENTS |
| 摘要 |
<p>In one aspect, a method of improving the performance of an electronic device manufacturing facility is provided, including the step of reducing the number of electronic device manufacturing component seasoning steps which are performed using production equipment, whereby the amount of electronic device manufacturing system downtime is reduced. Several other aspects are provided.</p> |
| 申请公布号 |
WO2009023124(A1) |
申请公布日期 |
2009.02.19 |
| 申请号 |
WO2008US09495 |
申请日期 |
2008.08.09 |
| 申请人 |
APPLIED MATERIALS, INC.;WANG, JIANSHENG;TAN, SAMANTHA |
发明人 |
WANG, JIANSHENG;TAN, SAMANTHA |
| 分类号 |
B65G43/00;G01R31/26 |
主分类号 |
B65G43/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
