| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit coating-type coating device which dynamically changes coating requirement in accordance with a film thickness of a coating liquid, which is applied to a substrate, to quickly, surely apply a coating liquid of preliminarily fixed film thickness, and to provide also provide its controlling method. <P>SOLUTION: The slit coating-type coating device is provided with; a moving means 110 which moves a substrate 1 and a coating head 30 at prescribed relative speeds; a distance-adjusting means 120 which adjusts a substrate-to-coating head distance which is a distance between the substrate and the coating head; a film thickness-measuring means 130 which measures a film thickness of a liquid (a coating solution 2) applied to the surface of the substrate; a coating requirement database 140 which stores, for each film thickness, coating requirement data 141 which include relative speeds and substrate-to-coating head distances for applying the liquid with prescribed film thicknesses; and a control part 150 which extracts the coating requirement data, which make the film thicknesses of the liquid become preliminarily fixed film thicknesses, from the coating requirement database on the basis of the film thicknesses of the liquid which are measured by the film thickness-measuring means, and controls the head-moving means and the head distance-adjusting means on the basis of the extracted coating requirement data. <P>COPYRIGHT: (C)2009,JPO&INPIT |
