| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems: that crystal growth including consideration of the direction of spontaneous polarization derived from the crystal structure of zinc oxide and zinc oxide solid solution is obtained in manufacturing an electronic element and an optical element each comprising zinc oxide and zinc oxide solid solution; that in order to actualize the crystal growth, the following must be studied, such as selection of a substrate material quality in crystal growth and conditions in crystal growth or preprocessing after crystal growth, and a technique for growing crystals for a desired spontaneous direction must be obtained, i.e. a desired crystal growth direction; and that when economic aspects such as a manufacturing cost is taken into consideration, zinc oxide enabling the use of substrate material which is more fluently circulated in the market and having a controlled spontaneous polarization direction, i.e. a crystal growth direction is required. SOLUTION: This element substrate has a buffer layer of a spinnel structure between a substrate and a zinc oxide thin film, and the zinc oxide thin film has a Wultzite crystal structure and its surface as a zinc (0001) face. COPYRIGHT: (C)2009,JPO&INPIT
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