| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method, an inspection device and an inspection program of a plane display panel capable of matching automatic inspection results by image processing with sensual inspection results. SOLUTION: The inspection method of the plane display panel includes the steps of; acquiring a plurality of imaged images by imaging the plane display panel in a plurality of times, and forming an average image by adding the plurality of imaged images; forming a background image from the average image by reducing and then enlarging the average image, and forming a differential image between the average image and the background image; extracting irregularity defects from the differential image; and classifying the extracted irregularity defects based on the shape and size thereof. COPYRIGHT: (C)2009,JPO&INPIT
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