发明名称 |
METHOD OF WAFER LEVEL TRANSIENT SENSING, THRESHOLD COMPARISON AND ARC FLAG GENERATION/DEACTIVATION |
摘要 |
<p>A method for processing a semiconductor wafer in a plasma reactor comprises sensing transient voltages or currents on a conductor coupled to the wafer and providing a first comparator for comparing the transient voltages or currents with a threshold level stored in the comparator. The method further includes transmitting from the comparator an arc flag signal whenever a transient voltage or current is sensed that exceeds the threshold level, and deactivating the power generator in response to the arc flag signal.</p> |
申请公布号 |
WO2009023133(A1) |
申请公布日期 |
2009.02.19 |
申请号 |
WO2008US09527 |
申请日期 |
2008.08.08 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PIPITONE, JOHN;NUNN-GAGE, RYAN |
分类号 |
C23C14/32 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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