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发明名称
Silicon release coating, method of making same, and method of using same
摘要
申请公布号
AU2008202445(A1)
申请公布日期
2009.02.19
申请号
AU20080202445
申请日期
2008.06.03
申请人
GENERAL ELECTRIC COMPANY
发明人
RALF JONCZYK
分类号
C01B33/00;H01L21/77
主分类号
C01B33/00
代理机构
代理人
主权项
地址
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