发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a technique for reducing the area of a semiconductor device comprising a resistive element so that the area is smaller than before. SOLUTION: N type epitaxial layers 2a and 2b are formed on the front surface of a P type semiconductor substrate 1. A P+ separating layer 3 for electrically separating the epitaxial layer 2a and the epitaxial layer 2b are formed. The P+ separating layer 3 is formed in a circular shape in such a manner that a portion of a polysilicon resistor layer 5 and the epitaxial layer 2a are surrounded. An insulating film 4 is formed on the epitaxial layers 2a and 2b. The polysilicon resistor layer 5 is formed via the insulating film 4. An insulating film 6 is formed on the insulating film 4 in such a manner that the insulating film 6 covers the polysilicon resistor layer 5. Contact holes 7a and 7b reaching the polysilicon resistor layer 5 are formed in the insulating film 6. Wiring layers 8a and 8b are formed in contact holes 7a and 7b, respectively. COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2009038100(A) |
申请公布日期 |
2009.02.19 |
申请号 |
JP20070199133 |
申请日期 |
2007.07.31 |
申请人 |
SANYO ELECTRIC CO LTD;SANYO SEMICONDUCTOR CO LTD |
发明人 |
NOMURA YOSHINOBU;MIZUNO YOSHIYUKI |
分类号 |
H01L21/822;H01L21/8234;H01L27/04;H01L27/06 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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