| 摘要 |
An evaporator for organic thin film vapor deposition is provided to improve utilization ratio of the deposition material by controlling the angle of the jet blade and jet blade to differentiate the steam pressure. An evaporator for organic thin film vapor deposition includes a crucible accommodating the deposition material, a heater heating the deposition material with the molecular flow state, and a jet blade(200) of vane-type controlling spray pressure of the deposition material. A spray angle controller(210) controls the angle of jet blade, and a lid part prevents spray of the steam vapor while being assembled with crucible. |
