| 摘要 |
A substrate transfer apparatus is provided to prevent the edge part of a substrate from being damaged when transferring the standing substrate. A substrate transfer apparatus comprises the followings: the first flange(110) facing the upper-side edge part of a received substrate(S) which is standing; a transfer frame(100) having the second flange(120) facing the lower corner part; a tilt angle control means which adjusts the tilt angle of the transfer frame by being installed at one side of the transfer frame; and a transfer means(300) which is installed inside the first and second flanges to transfer the standing substrate within the transfer frame by the tilt angle control means, and comprises an elastic support unit at a part adjacent to the upper and lower corner parts of the substrate. |
