APPARATUS FOR ULTRA-SONIC CLEANING DURING PREPROCESSING PRINTED CIRCUIT BOARD

摘要

A cleaning device for the printed circuit board is provided to focus the supersonic vibration on the substrate by setting up the guide panel in both sides of the substrate. The vibrator(130) for ultrasonic generation is prepared in the bottom of the process bath(100) for the cleaning solution. The frequency range of the ultrasonic wave of the vibrator is the megasonic of 700 kHz ~ 1.2 MHz. The pair of guide panel(120) is installed in both sides direction of substrate to focus uniformly supersonic vibration on the surface of the substrate(140). The shower device spreads cleaning solution to the substrate surface when raising the substrate to exhaust.