发明名称 Fabrication method
摘要 A process and an architecture related to a vertical MOSFET device and a capacitor for use in integrated circuits. The integrated circuit structure includes a semiconductor layer with a major surface and further including a first doped region formed in the surface. A second doped region of a different conductivity type than the first doped region is positioned over the first region. A third doped region of a different conductivity type than the second region is positioned over the second region. The integrated circuit includes a capacitor having a bottom plate, dielectric layer and a top plate. In an associated method of manufacture, a first device region. is formed on a semiconductor layer. A field-effect transistor gate region is formed over the first device region. A capacitor comprising top and bottom layers and a dielectric layer is formed on the semiconductor layer.
申请公布号 US7491610(B2) 申请公布日期 2009.02.17
申请号 US20070809873 申请日期 2007.06.01
申请人 AGERE SYSTEMS INC. 发明人 CHAUDHRY SAMIR;LAYMAN PAUL ARTHUR;MCMACKEN JOHN RUSSELL;THOMSON J. ROSS;ZHAO JACK QINGSHENG
分类号 H01L21/8232;H01L27/04;H01L21/334;H01L21/336;H01L21/822;H01L21/8234;H01L27/06;H01L27/088;H01L29/78 主分类号 H01L21/8232
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