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发明名称
Process tube for manufacturing semiconductor wafers
摘要
申请公布号
USD586768(S1)
申请公布日期
2009.02.17
申请号
US20070274293F
申请日期
2007.04.11
申请人
TOKYO ELECTRON LIMITED
发明人
INOUE HISASHI;ENDO ATSUSHI
分类号
主分类号
代理机构
代理人
主权项
地址
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