发明名称 |
Multi-spectral uncooled microbolometer detectors |
摘要 |
A process and system for a medium wave infrared (MWIR) uncooled microbolometer focal plane array (FPA). One embodiment is for a single MWIR band uncooled IR detector, wherein the design and fabrication utilizes standard silicon processing techniques reducing manufacturing costs and preserving existing manufacturing capabilities. Another embodiment is a two color uncooled microbolometer IR detector providing broadband detection.
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申请公布号 |
US7491938(B2) |
申请公布日期 |
2009.02.17 |
申请号 |
US20050589525 |
申请日期 |
2005.03.23 |
申请人 |
BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. |
发明人 |
GENECZKO JEANNIE;BLACKWELL RICHARD;KOHIN MARGARET |
分类号 |
G01J5/00;G01J3/36;G01J5/20;H01L27/146;H01L31/09 |
主分类号 |
G01J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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