发明名称 Method of forming thick silica-based film
摘要 A silica-based coating film on a substrate surface is prepared by forming a reaction mixture comprising a tetraalkoxysilicon compound (A) and/or an alkyl/alkoxy silane compound (B), an alcohol (C), and oxalic acid (D), in such ratios that the amount of alcohol (C) ranges from 0.5 to 100 mols per mol of all alkoxy groups present in the silicon compounds (A) and (B), and the amount of oxalic acid (D) ranges from 0.2 to 2 mols per mol of all alkoxy groups in the silicon compounds (A) and (B), and while maintaining the mixture at a SiO2 concentration ranging from 0.5 to 11%, as calculated from silicon atoms in the mixture, by means of the alcohol (C); heating the reaction mixture at a temperature ranging from 50 to 180° C. until the total remaining amount of the silicon compounds (A) and (B) in the reaction mixture is not more than 5 mol %, to form a solution of a polysiloxane having a number average molecular weight, calculated on the basis of a polystyrene standard, ranging from 2,000 to 15,000; applying a coating fluid containing the solution of the polysiloxane onto a substrate surface; and thermally curing a coating film obtained by the application, at a temperature ranging from 80 to 600° C.
申请公布号 US7491651(B2) 申请公布日期 2009.02.17
申请号 US20060409086 申请日期 2006.04.24
申请人 NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 MOTOYAMA KENICHI;NAKADA TAKAKAZU;FURUSHO HITOSHI;FUKURO HIROYOSHI
分类号 H01L21/31;C08G77/08;C09D5/25;C09D183/02;C09D183/04;H01L21/312 主分类号 H01L21/31
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