发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device has a semiconductor substrate and a high-resistance first conductivity type well region disposed on the semiconductor substrate. A low-resistance second conductivity type source region and a low-resistance second conductivity type drain region are formed in the well region. The well region is formed with trenches having convex and concave portions and that are disposed parallel to a source-drain direction of the source and drain regions. A gate insulating film is disposed on surfaces of the convex and concave portions of the trenches. A gate electrode is disposed on the gate insulating film.
申请公布号 US7492035(B2) 申请公布日期 2009.02.17
申请号 US20060397470 申请日期 2006.04.04
申请人 SEIKO INSTRUMENTS INC. 发明人 RISAKI TOMOMITSU
分类号 H01L29/207;H01L29/227 主分类号 H01L29/207
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