发明名称 SUPPORTING PLATE FOR SLICING SILICON INGOT
摘要 A supporting plate for slicing a silicon ingot is provided to reduce a consumed amount of a support material by reducing an error and a resistance to a slicing device. A support includes a fixing unit(2) protruded from both sides of a curved surface(1) and the curved surface contacting the silicon ingot. The fixing unit is formed with the step with an end part(12) of the curved surface. The lowermost part(11) of the curved surface is formed in the location higher than the uppermost part(21) of the fixing unit.
申请公布号 KR100884246(B1) 申请公布日期 2009.02.17
申请号 KR20070085325 申请日期 2007.08.24
申请人 DOW BEAM CO., LTD. 发明人 KIM, KYUNG JOONG
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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