发明名称 Method of manufacturing electro-optical device
摘要 There is provided a method of manufacturing an electro-optical device from a large substrate that is cut into a plurality of first substrates having a chip shape. In the electro-optical device, second substrates of a chip shape are bonded to the first substrates. The method includes adhering a large glass substrate to approximately an entire surface of the large substrate opposite to a surface to which the second substrates are bonded; and cutting both the large substrate and the large glass substrate into first substrate units.
申请公布号 US7491580(B2) 申请公布日期 2009.02.17
申请号 US20050131235 申请日期 2005.05.18
申请人 SEIKO EPSON CORPORATION 发明人 MATSUSHIMA SEIICHI;MURAKAMI KENJI;MARUYAMA HIROKI
分类号 H01L21/461;G02F1/13;G02F1/1333;G02F1/1335;G09F9/00;H01L21/77;H01L21/84;H01L27/12 主分类号 H01L21/461
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