| 摘要 |
<p>A hybrid marking method is provided to check a marking result previously and to perform a broadband marking process at high speed. A processed product is 3D-scanned and the outer shape property of the processed product is grasped(S20). Data obtained by a scan process is analyzed and the layout of the processed product is confirmed(S50). The marking area is designated according to the layout(S60). A stage is moved by interlocking with a reflective scanner to include the processed product in a field range if the marking area is out of the field range where the laser penetrating through an after theta lens reaches(S70,S80). The marking process is performed in the processed product included in the field range(S90).</p> |
