发明名称 PHOTOCATHODE LIGHTING DEVICE, METHOD FOR MANUFACTURING THE SAME AND EXPOSURE APPARATUS USING PHOTOCATHODE LIGHTING DEVICE
摘要 The photocathode lighting device of planar light emission including: a light source unit emitting a first light; a cathode plate contacted face-to-face with the light source unit; a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures; a photocathode formed on a surface of the metal mask layer, receiving the first light, and emitting an electron; an anode plate facing the cathode plate and spaced apart from the cathode plate; and a phosphor formed in a lower part of the anode plate and emitting a second light when the emitted electron collides with the phosphor.
申请公布号 KR100884131(B1) 申请公布日期 2009.02.17
申请号 KR20070051746 申请日期 2007.05.28
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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