发明名称 Method and apparatus for testing a hall magnetic field sensor on a wafer
摘要 A method for testing a Hall magnetic field sensor on a wafer includes generating a current flow in a Hall plate of the Hall magnetic field sensor. At least one voltage value across first and second nodes is measured and a measured voltage signal is provided indicative thereof. An electrical resistance based upon the measured voltage and the current is then determined, in the absence of an applied test magnet field.
申请公布号 US7492178(B2) 申请公布日期 2009.02.17
申请号 US20060455912 申请日期 2006.06.19
申请人 MICRONAS GMBH 发明人 BIDENBACH REINER;SCHUBERT JENS;KREDLER STEFAN;JANKE RALF
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
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