发明名称 Method of forming a conductive line and a method of forming a conductive contact adjacent to and insulated from a conductive line
摘要 This invention includes methods of forming conductive lines, and methods of forming conductive contacts adjacent conductive lines. In one implementation, a method of forming a conductive line includes forming a conductive line within an elongated trench within first insulative material over a semiconductive substrate. The conductive line is laterally spaced from opposing first insulative material sidewall surfaces of the trench. The conductive line includes a second conductive material received over a different first conductive material. The second conductive material is recessed relative to an elevationally outer surface of the first insulative material proximate the trench. A second insulative material different from the first insulative material is formed within the trench over a top surface of the conductive line and within laterally opposing spaces received between the first insulative material and the conductive line. In one implementation, a conductive contact is formed adjacent to and insulated from the conductive line.
申请公布号 US7491641(B2) 申请公布日期 2009.02.17
申请号 US20060412524 申请日期 2006.04.27
申请人 MICRON TECHNOLOGY, INC. 发明人 SOUTHWICK SCOTT A.;SCHRINSKY ALEX J.;MCDANIEL TERRENCE B.
分类号 H01L21/4763 主分类号 H01L21/4763
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