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发明名称
含有四烷基铵离子的显像废液之处理方法
摘要
于含有四烷基铵离子的显像废液之处理方法中,依顺序进行使阳离子交换树脂或螯合树脂接触酸之氢离子型转换步骤,使接触水直到来自该树脂的馏出液之pH成为3以上之酸去除步骤,使接触0.3mol/L~0.8mol/L的四烷基铵离子溶液之四烷基铵离子型转换步骤,使接触含有四烷基铵离子的显像废液,以去除该废液中的杂质之显像废液处理步骤。
申请公布号
TW200906732
申请公布日期
2009.02.16
申请号
TW097115100
申请日期
2008.04.24
申请人
德山股份有限公司
发明人
岩本久 HISAHIKO IWAMOTO;山下喜文
分类号
C02F1/42(2006.01)
主分类号
C02F1/42(2006.01)
代理机构
代理人
黄于真;李国光
主权项
地址
日本
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