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发明名称
曝光方法及电子零件制造方法
摘要
本发明之使用投影光学系统(PL)在基板(W)上之各单位曝光区域曝光明暗图案的曝光方法包含:检测存在于基板之一个单位曝光区域内的复数微小区域之位置的位置检测步骤(S13);依据关于位置检测步骤所获得之复数微小区域的位置之资讯,算出前述单位曝光区域内之变形状态的变形算出步骤(S14);及依据变形算出步骤所获得之变形状态,变更应曝光于基板之明暗图案的形状之形状变更步骤(S15)。以位置检测步骤检测之微小区域包含形成于单位曝光区域内之电路图案。
申请公布号
TW200908086
申请公布日期
2009.02.16
申请号
TW097113868
申请日期
2008.04.16
申请人
尼康股份有限公司
发明人
木内彻;白石直正;井上英也
分类号
H01L21/027(2006.01);G03F7/20(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
陈传岳;郭雨岚
主权项
地址
日本
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