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发明名称
PROCEDE DE FABRICATION D'UNE STRUCTURE MICRO-TECHNOLOGIQUE MIXTE ET UNE STRUCTURE AINSI OBTENUE
摘要
申请公布号
FR2906078(B1)
申请公布日期
2009.02.13
申请号
FR20060053820
申请日期
2006.09.19
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE INDUSTRIEL ET COMMERCIAL
发明人
KOSTRZEWA MAREK;MORICEAU HUBERT;ZUSSY MARC
分类号
H01L21/762;B81C1/00;H01L27/12
主分类号
H01L21/762
代理机构
代理人
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