PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC ULTRASONIC LINEAR MOTOR THEREBY AND MANUFACTURING METHOD THEREOF

摘要

A piezoelectric actuator, a piezoelectric ultrasonic linear motor using the same and a method for manufacturing the same are provided to improve control precision within a large displacement by directly moving an object. A piezoelectric layer(11) and a multiple layer(12) are integrally formed by a high temperature sintering process and a hole(13) is punched in the center. A piezoelectric actuator of a disk-type, uni-morph type, is polarized to a thickness direction thereof and moves to front and back surfaces when voltage is applied.