| 摘要 |
Provided is a probe card by which rigidity of a space transformer can be easily improved at a low cost. The probe card is provided with a flat-board-like wiring board (11) having a wiring pattern corresponding to a circuit structure for generating signals for inspection; an interposer (13) stacked on the wiring board (11) for relaying the wiring on the wiring board (11); a space transformer (14), which is stacked on the interposer (13) and firmly fixed with an adhesive (19), converts an interval of the wiring relayed by the interposer (13) and exposes the wiring from a surface on the opposite side to the side facing the interposer (13); and a probe head (15) stacked on the space transformer (14) for storing and holding a plurality of probes.
|
