| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a double side polisher capable of performing parallel and flat surface polishing without having the metallic powder of a gear and a solidified body of a polishing agent contaminating or scratching the surface of a polishing object. <P>SOLUTION: In the double side polisher, a projection 5 is formed on one surface of a carrier 8 holding the polishing object 6. By inserting the projection 5 in a through-hole 4 formed at a lower surface plate 1 or an upper surface plate 2, the carrier 8 is arranged in a rotatable state at a prescribed position in the upper and lower surface plates 1, 2. The upper surface plate 2 is placed on the carrier 8, and the upper and lower surface plates 1, 2 are rotated. Thereby, the carrier 8 is made to perform planetary motion to polish both surfaces of the polishing object 6 held by the carrier 8. <P>COPYRIGHT: (C)2009,JPO&INPIT |
