发明名称 COLOR FILTER AND METHOD OF MANUFACTURING THE SAME, AND SOLID-STATE IMAGING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a color filter that improves a pattern formation limit to form a finer pattern. <P>SOLUTION: The present invention provides the method of manufacturing the color filter, including: forming a first color pattern in a repeating pattern on a support; forming, on the support, a second color pattern in stripes in regions where the first color pattern is not formed; removing at least one portion of the first color pattern and/or the second color pattern by dry-etching, the portion being in a region where a third color pattern is to be formed; and forming, on the support, the third color pattern in the region where the portion of the first color pattern and/or the second color pattern has been removed. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009031723(A) 申请公布日期 2009.02.12
申请号 JP20070340293 申请日期 2007.12.28
申请人 FUJIFILM CORP 发明人 YOSHIBAYASHI KOJI;KINUMURA TERUAKI;KIKUCHI TOMOYUKI
分类号 G02B5/20;G02F1/1335;H01L27/14 主分类号 G02B5/20
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