摘要 |
PROBLEM TO BE SOLVED: To provide a dual pressure sensor which is simplified by reducing a parts count and improves assembly workability and airtightness. SOLUTION: Pressure-sensitive diaphragm chips 16A, 16B are fixed to bases 15A, 15B, respectively, to form two pressure sensor units 3A, 3B. The bases 15A, 15B includes base main bodies 15A-1, 15B-1 having communicating channels 21a, 21b therewithin and pressure introducing parts 15A-2, 15B-2 which are integrally protruded and provided on the base main bodies 15A-1, 15B-1, respectively. The pressure introducing parts 15A-2, 15B-2 are protruded to the outside from through holes 11a, 11b provided in an airtight enclosure 2, respectively. COPYRIGHT: (C)2009,JPO&INPIT
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