发明名称 PROCESS FOR MANUFACTURING OPTICAL MATRIX DEVICE
摘要 <p>A process for manufacturing an optical matrix device, in which in the operation of printing coating film formation, when at least one of conductive, semiconductor and insulating materials for device construction is formed by the printing coating film formation, thermal processing in the thermal processing step is applied to the above at least one of conductive, semiconductor and insulating materials. This application of thermal processing would enhance the performance of device (in Examples, flat panel X-ray detector (FPD)).</p>
申请公布号 WO2009019762(A1) 申请公布日期 2009.02.12
申请号 WO2007JP65428 申请日期 2007.08.07
申请人 SHIMADZU CORPORATION;ADACHI, SUSUMU 发明人 ADACHI, SUSUMU
分类号 H01L21/336;G01T1/24;H01L21/20;H01L21/288;H01L27/146;H01L29/786 主分类号 H01L21/336
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