| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device that can provide polarization patterns, including radial and tangential patterns, without requiring excessively complicated mechanical structure in a polarization pattern assembly. <P>SOLUTION: A frame and at least one polarization pane connected to the frame are provided, and by changing the polarization direction of light transmitted through the polarization pane, at least one polarization pattern is obtained over a pupil of an illuminator. <P>COPYRIGHT: (C)2009,JPO&INPIT |
