| 摘要 |
PROBLEM TO BE SOLVED: To attain high-accuracy and high-speed positioning control. SOLUTION: This positioning control system 1 has a displacement sensor 4 outputting a predetermined number of driving signals to a resonance circuit 6 and performing free oscillation wave count processing of counting the number of free oscillation waves output in an attenuated state from the resonance circuit 6 after the output stop of the driving signals and determining whether the count number has reached a predetermined number N, wherein the count number N of free oscillation waves in one free oscillation wave count processing can be changed in detecting a phase shift component of free oscillation waves based on time measurement required for the free oscillation count processing. A positioning control device 5 comprises a means for outputting a change command of the count number N to the displacement sensor 4 according to deviation H of a detected position K with respect to a target position T of a movable body 2, and the means increases the count number N in accordance with the decrease of the deviation H. COPYRIGHT: (C)2009,JPO&INPIT
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