| 摘要 |
A field emission with silicide nano wires and a device fabrication method are provided to improve the performance by increasing the emission current with the less voltage. A substrate is formed of the conductor or the non-electric conductor. The metallic catalyst is coated on the top of substrate. The metallic catalyst is comprised of the metal with the superior conductivity selected from the group including nickel, iron, cobalt, platinum, molybdenum, tungsten, yttrium, gold, and palladium. The silicon layer is formed on the upper side of substrate. The metal silicide layer with the superior conductivity is formed by the reaction between the metallic catalyst and the silicon layer.
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