| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently remove scattered particles without reducing the light quantity of EUV light. <P>SOLUTION: This removing apparatus for reducing the scattered particles, which irradiates the optical path of EUV light with charged particles, comprises an ejection section for ejecting charged particles at a predetermined solid angle and enlarging an irradiation region to be irradiated with the charged particles within the optical path, and a recovery section for recovering the scattered particles charged through irradiation with the charged particles. <P>COPYRIGHT: (C)2009,JPO&INPIT |
