| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a multi-piece substrate capable of preventing plated metal from being deposited in a breaking groove. SOLUTION: The multi-piece substrate is plated by using electroless plating liquid containing sulphuric acid and dimethylamineborane (DMAB) as reducing agents, so that Ni-B alloy layer 19 whose thickness is 1.2μm is coated to be formed on a metal layer 15. Next, a surface of the Ni-B alloy layer 19 is cleaned by using acid cleaning liquid. More specifically, the acid cleaning is carried out by dipping a fired substrate 47 in the acid cleaning liquid. Then, a surface of the Ni-B alloy layer 19 is plated by using the electroless plating liquid containing sulphuric nickel and hypophosphorous acid sodium as the reducing agents, so that Ni-P alloy layer 21 whose thickness is 3.0μm is coated to be formed thereon. COPYRIGHT: (C)2009,JPO&INPIT
|
