发明名称 METHOD FOR FORMING SELF-ALIGNED WELLS TO SUPPORT TIGHT SPACING
摘要 <p>Methods include utilizing a single mask layer (306) to form tightly spaced, adjacent first-type and second-type well regions (310, 314). The mask layer is formed over a substrate (302) in a region in which the second-type well regions will be formed. The first-type well regions are formed in the exposed portions of the substrate. Then, the second-type well-regions are formed through the resist mask.</p>
申请公布号 WO2009021187(A2) 申请公布日期 2009.02.12
申请号 WO2008US72631 申请日期 2008.08.08
申请人 TEXAS INSTRUMENTS INCORPORATED;SRIDHAR, SEETHARAMAN 发明人 SRIDHAR, SEETHARAMAN
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址