MULTILAYER MICRODEVICE, AND PROCESS FOR PREPARING SAID MULTILAYER MICRODEVICE

摘要

A multilayer microdevice containing microchannels and having integrated electrodes and its preparation process. In a preferred embodiment, the microchannels are made made from toner. Planar electrodes are fabricated using toner masks by the steps of: covering the substrate with photosensitive material, photoengraving the desired image, developing, sputtering deposition onto substrates, and removal of toner layer by a lift-off process.