| 摘要 |
<p>A cold-cathode ionization gauge which is easily discharged and has only a small time lag between the time when it is applied with a high voltage and the time when it is discharged and current starts to flow therein, and has no directionality to be considered in installing an anode and thereby allows an easy replacement of the anode. The cold-cathode ionization gauge includes a tubular cathode (23) arranged in a space which communicates with a chamber for measuring the pressure, a rod-like anode (5) disposed in the internal space of the tubular cathode (23), and magnetic means (25a, 25b) which form a magnetic field nearly perpendicular to an electric field between the anode (5) and cathode (23) and causes discharge between the anode (5) and cathode (23). The anode (5) is formed with a screw portion (5b) in the end part and is disposed inside the space of the tube of the cathode (23).</p> |
