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发明名称
Vorrichtung zur Interferenzmessung
摘要
申请公布号
DE602006004515(D1)
申请公布日期
2009.02.12
申请号
DE20066004515T
申请日期
2006.07.21
申请人
CANON K.K.
发明人
KADOWAKI, HIDEJIRO;ISHIZUKA, KO;KATO, SHIGEKI
分类号
G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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