发明名称 |
WARM WATER DRYING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a warm water drying device capable of suppressing an occurrence of a bubbling and a bubble on the surface of a warm water bath. SOLUTION: The warm water drying device includes: an upward-opening cone bath provided under the warm water bath; a warm water supplying hole provided at a center part of the bottom of the cone bath; a downward-opening hollow cone member for receiving a discharged water from the warm water supplying hole provided at the upper part of the warm water supplying hole so as to cover the warm water supplying hole; an outside periphery of the lowest end of the hollow cone member being adjacent to the slanted wall surface of the cone bath with the predetermined gap; and an exhaust pipe coupled to the bottom of the hollow cone member in order to exhaust the bubble occurring due to the discharged water with the exhaust pipe end part connected to the part upper than the warm water bath. COPYRIGHT: (C)2009,JPO&INPIT
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申请公布号 |
JP2009032861(A) |
申请公布日期 |
2009.02.12 |
申请号 |
JP20070194452 |
申请日期 |
2007.07.26 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
MARUYAMA MAKOTO;MIYAJIMA SHUNEI |
分类号 |
H01L21/304;F26B9/06;F26B21/14 |
主分类号 |
H01L21/304 |
代理机构 |
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地址 |
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