| 摘要 |
PROBLEM TO BE SOLVED: To assure an inspection in accuracy by stably discriminating a tilt state of a surface, even when an illuminating device employing a point source such as an LED having a high directivity is used without introducing any diffusion plate. SOLUTION: A color camera 1 is disposed above a substrate S so that its light receiving surface may be opposite to a substrate surface, and the illuminating device 2 is disposed between the camera 1 and the substrate S, and then the inspection is carried out for a fillet 71 on the substrate S. Although the illuminating device 2 is configured such that respective color light beams of red, green and blue enter a view field of the camera 1 in different directions, by using LEDs 21R, 21G and 21B arranged concentrically, any diffusion plate is not disposed at each light emitting surface. In the inspection, high-luminance areas generated by respective illumination colors are extracted from an image formed by the camera 1, and the whole range, where these areas are distributed with spacings corresponding to distances between the LEDs, is specified as a color area corresponding to the illumination colors, and the number of component pixels in each color area is checked with a prescribed reference value. COPYRIGHT: (C)2009,JPO&INPIT
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