| 摘要 |
PROBLEM TO BE SOLVED: To provide a carbon thin film manufacturing method for enhancing adhesiveness. SOLUTION: An intermediate layer 6 of a carbon thin film provided body 7 is deposited by setting the bias voltage applied to a base material 5 to be a predetermined value in the range of 0V to -30V. Thus, any excessive hardening of the intermediate layer 6 is avoided, and the intermediate layer is rich in toughness, consequently during the use of the carbon thin film provided body 7, the capacity of mitigating the stress and the external force applied from a DLC film 1 deposited on an upper layer of the intermediate layer 6 becomes high, cracks in the intermediate layer 6 causing peeling of the carbon thin film provided body 7 hardly occur, and excellent adhesiveness can be demonstrated. COPYRIGHT: (C)2009,JPO&INPIT
|
