发明名称 |
PROBE CARD, SEMICONDUCTOR INSPECTING APPARATUS, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE |
摘要 |
A frame bonded and fixed to a back face of a probe sheet so as to surround a group of pyramid-shaped or truncated pyramid-shaped contact terminals collectively formed at a central region portion of the probe sheet on a probing side thereof is protruded from a multi-layered wiring board, and pressing force is imparted to the frame and a pressing piece at a central portion by a plurality of guide pins having spring property so as to tilt finely.
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申请公布号 |
US2009042323(A1) |
申请公布日期 |
2009.02.12 |
申请号 |
US20080143448 |
申请日期 |
2008.06.20 |
申请人 |
KASUKABE SUSUMU;OKAMOTO NOAKI |
发明人 |
KASUKABE SUSUMU;OKAMOTO NOAKI |
分类号 |
H01L21/66;G01R1/073 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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